Yudu County, Ganzhou, Jiangxi, China sales3@ar-reagent.com 3170906422@qq.com
Follow us:



HEXAMETHYLDISILAZANE: A Commentary on Its Role in Chemistry and Industry

Historical Development

Chemistry, as a field, grows through a mix of curiosity, accident, and stubborn effort. HEXAMETHYLDISILAZANE, often known in labs as HMDS, traces its roots back to periods when silicon chemistry was just starting to find a place outside glass and sand. Early researchers poking around with silicon and nitrogen ended up with basic silazane compounds. By the mid-20th century, as labs learned more about handling organosilicon materials, scientists synthesized HMDS and realized it had more to offer than just being another strange-smelling compound on the shelf. In those growing years for organosilicon chemistry, the discovery of HMDS allowed chemists to shift from simple siloxanes to more functional, reactive frameworks.

Product Overview and Synonyms

HEXAMETHYLDISILAZANE goes by other names, including HMDS, 1,1,1,3,3,3-Hexamethyldisilazane, and N,N-Bis(trimethylsilyl)amine. These synonyms reflect the same core structure: two silicon atoms bridged by a nitrogen atom, each silicon surrounded by three methyl groups. Other familiar trade names show up in chemical catalogs, but whether the bottle reads HMDS or something else, you’re working with a material that’s carved out a dependable place in both research and manufacturing.

Physical & Chemical Properties

To anyone who’s opened a container of HMDS, the first impression hits the nose: it brings a pungent, ammonia-like, odd siloxane aroma. The liquid forms a clear, nearly colorless substance, with a boiling point just above 125°C. In a lab, it pours easily but evaporates quickly if left open, thanks to a decent vapor pressure at room temperature. Unlike water, it doesn’t readily dissolve in polar solvents. Instead, HMDS likes oil-based or non-polar environments, making it handy for processes where water would spoil the result. The Si-N-Si backbone also brings high thermal stability, which is why it survives tough processes in electronics production. Chemically, it reacts quickly with surfaces or molecules containing active hydrogen—think hydroxyls in glassware or the surface of silicon wafers.

Technical Specifications & Labeling

Anyone purchasing HMDS finds technical data sheets with purity ratings, usually above 99%, and material safety advice that warns of flammability and the need for careful storage. In practice, purity means less trouble downstream, especially when using HMDS as a reagent. Details about contaminants—mainly siloxanes, ammonia, or trimethylsilanol—highlight the importance of reliable sourcing for critical applications. Storage containers require labeling for acute toxicity, environmental hazards, and flammability, and careful bottling prevents exposure or degradation. Proper labeling makes a difference not just for legal compliance but for daily safe handling in busy labs or factories.

Preparation Method

Making HMDS isn’t about fancy tricks. The most common approach involves reacting trimethylchlorosilane with ammonia, yielding HMDS and ammonium chloride as a byproduct. This route offers decent yields, especially when pure reagents help minimize side reactions. Large-scale production relies on efficient distillation steps to separate HMDS from leftovers, and every batch demands strict attention to water content since traces of moisture lead to siloxane polymers that gum up equipment. On a much smaller scale, chemists learn to distill the product to avoid introducing impurities to sensitive procedures.

Chemical Reactions & Modifications

HMDS acts as a silylating agent. Give it the right conditions, and it swaps trimethylsilyl groups for active hydrogens in alcohols, acids, or even amines. This ability makes it the go-to for protecting groups in organic synthesis, turning otherwise reactive sites into something that won’t interfere. At the microelectronics level, HMDS vapor interacts with the hydroxyl-rich silicon dioxide layers of wafers, creating a hyrdophobic surface. That treatment keeps photoresist layers from lifting later in chip fabrication. The chemical toolbox expands further when HMDS reacts under heat or with appropriate catalysts—offering a bridge to silazanes, siloxanes, or silicone resins with custom properties. For students and seasoned chemists alike, these reactions show up regularly in textbooks and lab notebooks.

Safety & Operational Standards

Anyone who has handled HMDS learns fast: respect the safety protocols or deal with a mess. Despite a surprising stability to air and room temperatures, HMDS catches fire easily, and its vapors ignite if they hit open flame or sparks. Personal protective equipment isn’t just a suggestion—eye protection, gloves, and lab coats stand between the chemist and the kind of chemical burns or respiratory irritation that turn a routine day sour. Exhaust-ventilated hoods handle spills or routine transfers. Well-run facilities don’t rely on luck—SOPs exist for good reason, and accident logs remind crews that safety rules have real teeth. Besides flammability, HMDS decomposes in water, producing ammonia and volatile siloxanes, both of which can harm workers and pollute the environment if not contained. Waste disposal combines neutralization with strict collection to keep drains free of organosilicons, following both local laws and industry standards. Experienced teams take these risks seriously, and regulations guide every step from storage to disposal.

Application Area

The reach of HMDS spreads wide, from chemistry labs to the world’s cleanest microchip fabrication lines. Synthetic chemists use it as a go-between, protecting functional groups so reactions run true. HMDS finds use in surface science, treating glass or quartz to prevent sticking or contamination. Semiconductor manufacturing counts on HMDS for one clear reason: it primes silicon wafers before photolithography. That surface treatment makes future steps stickier for the right materials and cleaner for everyone downstream. In pharmaceuticals, even small-scale custom synthesis leans on HMDS to streamline difficult coupling reactions or make purification simpler. Some specialty coatings and adhesives in aerospace and automotive engineering use silazane chemistry, thanks to the resilience and adhesion improvements HMDS brings to the table. Industries prioritizing clean reactions, moisture-sensitive procedures, or specialized surfaces find a place for HMDS on their chemical shelf.

Research & Development

R&D teams still put effort into new uses and better production methods for HMDS. More efficient synthesis now seeks ways to cut hazardous byproducts and improve energy use. Research into alternative silylating agents pushes HMDS to stay competitive, leading to studies that compare its selectivity, cost, and performance. As electronics shrink and new microchip architectures roll out, the demands on wafer treatment chemicals change, giving HMDS a chance to evolve through improved purity levels, lower outgassing, or less volatile derivatives. Some groups look to biochemistry, exploring HMDS as a tool for derivatizing samples for mass spectrometry or chromatography. Each application brings its own challenges—and researchers push for tailored versions or new formulations that cut waste or streamline regulatory hurdles. My own time in a research lab always placed a premium on reagents that were reliable, available, and predictable under standard conditions; HMDS earned its spot by doing the job without frustrating side reactions.

Toxicity Research

Like many organosilicon compounds, HMDS brings health and environmental concerns. Animal studies show moderate toxicity by inhalation or skin absorption, with effects ranging from irritation to systemic damage at high exposures. Repeated skin contact can dry or burn, and inhaling concentrated vapors brings headaches, dizziness, or worse. Environmental release matters as well; silicon-containing degradation products, especially in water, pose challenges for wastewater treatment plants. Ongoing research tracks occupational exposures across industries, aiming for robust data on chronic risks and long-term impacts. Regulatory agencies set limits and push for minimized releases, while engineering controls reduce the amount workers inhale or touch in both small labs and massive chip fabs. Years of careful tracking show that, with regular maintenance and proper training, risks can be managed, but ongoing vigilance helps catch surprises before they become newsworthy incidents.

Future Prospects

Looking forward, HMDS stands as a bridge between hard-earned chemistry tradition and new technical challenges. Semiconductor fabrication won't ditch HMDS soon, given its proven performance, but competition from alternative surface treatments and stricter eco-friendly regulations drive investment in greener synthesis pathways. Markets for pharmaceuticals and specialty polymers also stand to benefit from HMDS-based innovations. Improved handling methods could cut exposure risk and waste, while formulations with lower volatility or more stable byproducts can help meet rising regulatory pressure across the globe. Some bright minds mine computational chemistry for better understanding of HMDS’s action in exotic reactions, hinting at future breakthroughs rather than slow evolution. Even as materials science stretches toward new frontiers—flexible electronics, ultrathin films, biocompatible coatings—expect to see HMDS or its next-generation cousins helping behind the scenes, just as they have for decades. The trick will be smart, careful development, grounded in real-world lab and factory experience, balancing performance, safety, and sustainability for a new era.




What is HEXAMETILDISILAZANO used for?

Understanding Its Place in Chemistry Labs

Hexamethyldisilazane—often called HMDS—shows up in more chemistry labs than folks might think. If you walk around a place that deals with making microchips, medical devices, or just basic science, you’re likely to find a bottle of it tucked away. It’s not a household item, but it tends to underline a lot of technology we take for granted. I’ve seen it first used during a summer internship at a university cleanroom, where researchers made tiny computer chips. The value of HMDS stands out when people want to keep tiny surfaces moisture-free and ready for coatings.

How HMDS Boosts Chip Manufacturing

A huge share of hexamethyldisilazane goes into prepping surfaces for photolithography. That’s the science of drawing crazy small patterns on silicon wafers—the things inside most electronics. Without HMDS, those patterns just don’t stick all that well. A technician told me he trusted it for giving the wafer a surface that grabs onto photoresist, since silicon alone pulls in water from air and messes things up. HMDS reacts with any water on the surface and replaces it with a layer that loves organics—making it much easier for the next steps to actually succeed. Thanks to this trick, modern smartphones can shrink down components, packing more power into a small space.

Beyond Electronics: Medical and Chemical Uses

The same trait that lets HMDS push away water in chipmaking pays off in other settings, too. It treats glassware before researchers peer into them with electron microscopes. In those cases, tiny biological samples—say, from a plant or a tissue slice—get dried out before imaging, but most drying methods wreck delicate shapes. HMDS lets the moisture leave slowly, so the fine structure survives. Labs in pharmaceuticals use small amounts of HMDS to protect and modify molecules during synthesis, preferring it to harsher reagents for some steps. It’s not the kind of stuff you want in your lungs, but in the hands of trained chemists, it opens up cleaner reactions and better outcomes.

Health and Safety Get Top Priority

Every industry job I’ve held required a long talk about safety with HMDS. It evaporates quickly and can irritate eyes, lungs, or skin. Companies enforce pretty serious air handling and rules about gloves. These workflows came out of years of data: inhaling HMDS on accident can sting, and repeated exposures aren’t safe over long periods. I know some workers who used personal air sensors just to be sure. If anyone gets too relaxed about its risks, reminders about safe practice often come from older coworkers who’ve seen what happens with spills or sneaky leaks.

Looking for Greener Alternatives

The chemical world always moves forward. Companies and researchers hunt for ways to do HMDS’s job with milder, safer compounds, especially as environmental guidelines tighten. Some startups try to design substitutes that break down faster or pose less harm to humans and water supplies. As chip designs reach even smaller sizes, switching away from HMDS could get tricky, since few chemicals match its results. The hunt for replacements reflects a broader push toward greener tech, which often starts with small choices in the lab.

The Real Takeaway with HMDS

HEXAMETILDISILAZANO might hide behind the scenes, but it helps drive advances in gadgets, medicine, and research. It earns respect from professionals for its reliability, and it keeps drawing attention as industries wrestle with its hazards and legacy. Anyone working with the stuff knows its strengths and its risks—and each year, the push for something safer and as effective picks up steam.

Is HEXAMETILDISILAZANO hazardous to health?

What Is HEXAMETILDISILAZANO and Why Should People Care?

HEXAMETILDISILAZANO, known in labs and industry as HMDS, pops up wherever silicon-based chemistry takes hold. Semiconductor makers rely on it, and it’s a familiar name for workers in electronics, pharmaceuticals, and advanced materials. It's not a household staple, but it’s close to the workbench for many.

Most folks have never handled chemicals like this, but for those who do, this isn’t some mystery ingredient. Its clear, volatile liquid form means it evaporates quickly, leaving few traces—unless someone breathes it or touches it without thinking through the risks.

Health Hazards: Where Risks Show Up

HMDS is more than a tongue-twister. It has a strong ammonia odor that hits hard. Short-term exposure can irritate eyes, nose, and throat. Splash a bit on your skin and expect dryness, redness, and maybe a rash if your skin stays in contact for too long. Labs report that inhalation sometimes leads to coughing or a burning sensation in the airways. People who’ve worked with this compound in confined spaces sometimes talk about dizziness or headaches if there’s not enough airflow.

According to Material Safety Data Sheets and reports from the International Chemical Safety Cards (ICSC), significant inhalation or accidental swallowing isn’t common in controlled environments. Still, the potential health outcomes shouldn’t be downplayed. Long-term health studies are scarce, so anyone handling HMDS day after day should take precautions, even if only working short hours or small quantities. Chronic effects haven’t staked out clear territory, but the lack of knowledge isn’t a green light for careless handling.

Environmental and Workplace Concerns

Once HMDS vapor drifts into the air, it breaks down, but in a closed shop or a tight lab, it lingers, causing trouble for those without proper ventilation. People with asthma or chemical sensitivity often report worse symptoms even at lower levels. Poor labeling and worn-out gloves can make matters worse, particularly in busy settings where shortcuts sometimes creep in to save time.

Government safety organizations lay out exposure limits, but numbers only mean so much unless teams at ground level understand the risk and commit to the work required to manage it. Stories from workers in printed circuit factories detail accidental spills, unexpected splashes, and the frustration of not finding the right gloves or goggles on a busy shift.

Solutions For Safer Use

Everyone handling HMDS deserves both knowledge and tools to do it safely. Good ventilation turns out to be essential. Simple things—hoods, fans, working windows—do more than expensive gadgets in many settings. Training that doesn’t skim over hazards gives new workers the best chance of avoiding painful mistakes. Old-timers benefit when safety updates go beyond a quick email or a handout taped to a wall. Gloves rated specifically for chemical resistance keep skin safe. Lab coats and face shields fill in the gaps.

Labels need to stay sharp and easy to read. Emergency eyewash stations may not win style points, but their presence saves eyesight. Clear written procedures help prevent improvisation. Waste handling can turn into an afterthought, so disposal guidelines for HMDS must be straightforward and enforced.

Looking Ahead

Technology isn’t backing away from chemicals like HMDS. Less toxic alternatives remain a work in progress. Until then, open, honest conversations help more than silence. Employees, managers, and safety officers all share responsibility for taking precautions seriously. No one wants to carry home the cost of shortcuts. The right steps reduce the risks—every workplace can commit to following them.

How should HEXAMETILDISILAZANO be stored?

Understanding the Risks

Anyone who’s worked around chemicals knows a label tells only part of the story. Hexametildisilazano isn’t your average lab supply. This stuff brings its own set of problems—mainly, it catches fire easily, fumes when wet, and reacts with loads of common materials. Stories from experienced chemists back this up—one spilled bottle in a warm storage closet turned a simple day in the lab into a race to douse a flame. Experts and incident reports point out how quickly it ignites, both in liquid and vapor form.

Choosing the Storage Spot

HEXAMETILDISILAZANO belongs nowhere near heat sources. Heated rooms, sunlit windowsills, radiator covers—these spell trouble. The best approach is a dedicated flammable materials cabinet. Metal cabinets with clear chemical ratings do a solid job, not just for fires, but peace of mind. Door gaskets and automatic closers help keep vapor inside; I've seen colleagues avoid nasty headaches and accidental exposures by taking this simple step.

Humidity’s another hidden challenge. The chemical reacts with water, sometimes violently, releasing noxious gases. Any leaks find stray moisture fast, so a dry storage area is non-negotiable. Desiccant packets and silica gel packs go a long way—old timers in the industry swear by this for keeping caps and threads moisture-free. It sounds basic, but it beats the mess a leaky lid can leave on a crowded shelf.

Container Considerations

HEXAMETILDISILAZANO eats through plastics and cheap rubber almost overnight. Glass containers with high-integrity seals last longest. It’s tempting to do a quick transfer into whatever’s on hand, but corroded plastics lead to spills, waste, and exposure. Chemists who’ve cut corners with container materials often end up regretting it, learning the hard way that even a small pinhole can result in hours of clean-up—and a day spent filling out safety forms.

It helps to keep containers tightly closed. Even a loosened cap after one quick pour allows fumes to escape. Repeated exposure runs the risk of vapor build-up, which sticks around just waiting for one misplaced lighter or spark. In established labs, a checklist before closing up shop helps catch those open bottles—simple, low-cost, big impact.

Labeling and Segregation

Labels shouldn’t just say “flammable.” Clear hazard warnings and date of acquisition reduce confusion in shared workspaces, especially where staff rotate often. In my own experience, I’ve watched accidents averted by a single line of marker warning about water reactivity or fume hazards. Store HEXAMETILDISILAZANO well away from acids, bases, and oxidizers—mixing even trace amounts can trigger fires or toxic clouds.

Disposal and Accidental Release

Even with tight precautions, spills happen. Keeping a spill kit close makes all the difference—absorbent pads, neutralizers rated for organosilicon compounds, personal protective gear. In my lab days, mock spill drills made sure no one hesitated if a bottle broke or tipped over. Local fire codes set the rules for expired or contaminated material, but consulting a chemical waste expert always gives the safest, fastest way to clear out old stock.

Training and Best Practices

No one expects new staff to arrive knowing HEXAMETILDISILAZANO inside out. Routine, direct training trumps jargon-filled manuals any day. Walking through the storage area, showing the spill kit, pointing out separate bins—it sets the right tone. Regular refreshers keep safe practices front of mind long after the first orientation.

Looking Ahead

Better storage is more than compliance. It keeps people safe, prevents property loss, and helps projects stay on track. Simple changes—metal cabinets, dry surroundings, the right labels—end up saving time, money, and headaches in the long run. HEXAMETILDISILAZANO demands respect, and the right storage earns it.

What safety precautions are needed when handling HEXAMETILDISILAZANO?

Why Pay Attention to Hexamethyldisilazane?

Few names in a lab stick out like hexamethyldisilazane. I remember the first time I opened a bottle of this stuff—I quickly realized the label warnings about its fumes weren't exaggerated. This chemical comes with clear risks, and a little experience around hazardous solvents made me double-check every step.

Serious Hazards—Why Not Ignore the Fine Print

Hexamethyldisilazane has that sharp, ammonia-like odor because it hydrolyzes quickly, releasing fumes that irritate the eyes, nose, and lungs. Over the years, enough researchers and students have landed in trouble after underestimating its flammability. The flash point sits around 39°C, so an open bottle near any ignition source spells trouble.

One thing people often overlook is how vigorously it reacts with water. During grad school, I watched a new intern pour it down the sink, only to set off a violent, hissing reaction. Small mistakes can snowball. Exposure to its vapors can cause headaches and breathing issues. Skin contact often leaves behind a rough chemical burn.

Proven Steps for Safer Handling

Let’s step through solid safety measures. Labs and workshops handling hexamethyldisilazane always run good ventilation, preferably using a certified fume hood. If a hood isn’t available, skip the task until you can access proper airflow. Respirators don't replace hoods here—the goal is to keep vapor out of your breathing zone altogether.

Gloves matter as much as the label says. Nitrile or neoprene gloves block direct skin contact—latex alone doesn’t hold up. I’ve seen colleagues get burned after skipping this simple step. Don’t stretch glove use, either; change them after spills or splashes. Safety goggles or face shields are vital since vapors can sneak under regular glasses. Add a flame-resistant lab coat to your outfit, since splashes burn through fabrics.

Storage and Spill Response That Actually Works

Keep hexamethyldisilazane well away from the regular chemical shelf. Short experience proves it’s safer in a flammable cabinet, tightly sealed in the original container. Don’t store it near humidifiers, sinks, or any water sources, as moisture triggers strong reactions.

Spills come with panic, but a practiced response pays off. Sand or commercial spill control agents work better than paper. Contain spill area fast, ventilate the space, and stay upwind. Remove open flames right away, and keep a chemical-rated fire extinguisher nearby. Don’t mop up with water—this just intensifies the hazards. Dispose of any contaminated materials as hazardous waste, never down the drain or in regular trash.

Training Makes the Difference

Working with hazardous chemicals gets easier with real training. I always push new lab members to review safety data sheets closely. Clear signage and regularly tested emergency eyewash stations keep problems in check. Supervisors who walk through safety drills help everyone relax a bit when something doesn’t go as planned.

Choosing to treat hexamethyldisilazane with respect isn’t just about ticking boxes. You stick around longer to run the next experiment, and that’s what counts—a small effort up front pays off in the long run, both for your work and your health.

What is the chemical formula of HEXAMETILDISILAZANO?

Understanding the Substance

Hexamethyldisilazane, known in chemistry circles as HMDS, shows up in many labs that deal with electronics, pharmaceuticals, and even materials science. Its chemical formula is C6H19NSi2. To many, this blend of carbon, hydrogen, nitrogen, and silicon seems like just a footnote on a data sheet, but in practice, each letter and number carries real weight in industries that rely on clean chemistry and predictable reactions.

Experience Using HMDS

During my years handling electronics manufacturing and research, HMDS became something of a familiar companion. It’s not just a chemical—think of it as a fixer, used as a surface treatment for silicon chips and glass to encourage adhesion. Cleaning a wafer might seem like a mundane task, but proper adhesion controls whether circuits last weeks or withstand years of use. If the mixture’s off or contaminated, the entire batch can go to waste. That’s how serious people get about molecular makeup—especially when a single atom out of place can tank product reliability.

Why the Formula Is More Than Numbers

For those working with HMDS, every atom counts. The two silicon atoms in C6H19NSi2 set it apart from other silazanes and give it the properties that make it perfect for silanization. The nitrogen atom is just as critical, helping with its ability to form stable bonds when prepping surfaces. If you ask someone in the lab about alternatives, they’ll point right back to the chemical formula: swap a silicon out, and the reaction profile changes completely. Labs chasing reliable outcomes know this and treat the specifics as non-negotiable.

Safety and Handling Concerns

Mishandling HMDS isn’t an abstract concern. Its formula means high volatility and flammability. Working with it taught me the value of good ventilation, strict storage, and keeping a fire extinguisher close. The methyl groups (the CH3’s making up much of the molecule) give it both power and danger, and accidents can get serious quickly. Clear labeling, training, and adherence to chemical safety data guide every movement around HMDS. These safety practices save lives and prevent damage to property. I’ve seen, more than once, how attention to chemical identities—like memorizing C6H19NSi2—has made the difference in emergency situations.

Supporting Reliable Science and Industry

HMDS underpins processes from chip manufacture to drug formulation. Semiconductor companies depend on its predictable interactions—trace impurities, or the wrong variation in the formula, could ruin an entire production cycle worth millions. Pharmaceutical groups value its role in synthesis routes because it keeps batch-to-batch results consistent. Even students learning lab basics grow to respect its unique properties, not for the sake of trivia but because their final results depend on it.

Solutions and Best Practices

Chemical verification remains vital. Regular analysis (gas chromatography, mass spectrometry) checks that what’s labeled as C6H19NSi2 really is just that. Procurement teams stick to trusted suppliers who can prove batch purity. Training programs focus not just on handling skills but on understanding why small molecular changes are a big deal. These efforts support both safety and effectiveness, keeping science and industry on stable ground rather than gambling with unknown variables.

HEXAMETILDISILAZANO
Names
Preferred IUPAC name Trimethyl[trimethylsilyl]azane
Other names HMDS
Hexamethyldisilazane
Bis(trimethylsilyl)amine
N,N-Bis(trimethylsilyl)amine
1,1,1,3,3,3-Hexamethyldisilazane
Pronunciation /heks.a.me.til.di.siˈla.zano/
Identifiers
CAS Number 1070-89-9
3D model (JSmol) `3D Model (JSmol) string for HEXAMETILDISILAZANO:` ``` C[Si](C)(C)N[Si](C)(C)C ```
Beilstein Reference 2879357
ChEBI CHEBI:59712
ChEMBL CHEMBL135703
ChemSpider 23302
DrugBank DB03799
ECHA InfoCard 12-02-00-00478
EC Number 2456-16-2
Gmelin Reference 51604
KEGG C01503
MeSH D06UF0375D
PubChem CID 66608
RTECS number MK3850000
UNII Z317B6R953
UN number UN1325
Properties
Chemical formula C6H19NSi2
Molar mass 161.38 g/mol
Appearance Colorless transparent liquid
Odor Ammonia-like
Density 0.77 g/cm3
Solubility in water Insoluble
log P 0.9
Vapor pressure 0.5 hPa (20 °C)
Acidity (pKa) 25.8
Basicity (pKb) pKb = 3.75
Magnetic susceptibility (χ) -0.09
Refractive index (nD) 1.404
Viscosity 0.65 mPa·s (25 °C)
Dipole moment 1.13 D
Thermochemistry
Std molar entropy (S⦵298) 218.6 J·mol⁻¹·K⁻¹
Std enthalpy of combustion (ΔcH⦵298) -1367 kJ/mol
Pharmacology
ATC code C07AX03
Hazards
GHS labelling GHS02, GHS07
Pictograms GHS02,GHS07
Signal word Danger
Hazard statements H226, H302, H314, H332
Precautionary statements P210, P233, P240, P241, P242, P243, P261, P264, P271, P280, P302+P352, P304+P340, P305+P351+P338, P312, P321, P332+P313, P337+P313, P362+P364, P370+P378, P403+P235, P405, P501
NFPA 704 (fire diamond) 1-3-1-W
Flash point 44 °C
Autoignition temperature 370 °C
Lethal dose or concentration LD50 Oral Rat 856 mg/kg
LD50 (median dose) LD50 (median dose): Rat oral 865 mg/kg
NIOSH RN 999-97-3
PEL (Permissible) PEL: "Not established
REL (Recommended) 200 ppm
IDLH (Immediate danger) Unknown
Related compounds
Related compounds Ammonia
Tetramethylsilane
Trimethylsilyl chloride
Hexamethyldisiloxane
Trimethylsilylamine